Professor of School of Engineering, Design and Built Environment, Western Sydney University, Australia. His research interests cover Industry 4.0, Additive Manufacturing, Advanced Engineering Materials and Structures (Metals and Composites), Multi-scale Modelling of Materials and Structures, Metal Forming and Metal Surface Treatment.
2024-02-24
2024-01-04
2023-11-02
Abstract—In this paper, a capacitance based accelerometer is studied. The sensitivity, frequency response, mask layout and finally fabrication process are presented. For the sensitivity of the selected accelerometer, the relative change of capacitance of the selected accelerometer with respect to acceleration a is derived, the frequency response of the accelerometer is investigated, and the value of which is estimated under the specified parameters provided; finally the accelerometer is displayed and it is fabricated by using several steps of deposition, patterning and etching.
