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Abstract—This paper describes the development of an industrial robot manipulator control system for 3D scanning of surfaces prior to robotic plasma processing and cutting of products with complex shape. Preliminary 3D scanning of the surface by a robot manipulator is needed to create a 3D model of a product in order to automatically generate a program for moving the robot to ensure robotic precise plasma processing or cutting of the product. The new algorithm of synthesis of the robot manipulator motion-controlling system by dynamics and perturbations compensation method has been developed. The scheme of 3D scanning on the basis of an industrial robot manipulator has been identified.