Please send your full manuscript to:
Abstract—An experimental procedure was performance on developed dicing machine to improve the positional accuracy and keep tolerances within acceptable range for precision manufacturing industry. The positional accuracy and repeatability of the developed dicing machine of the 5mm ball screw stage were studied and measured using laser interferometer. The values for positional accuracy and repeatability were performed and calculated according to ISO 230-2 standard for all three axes. Correction of pitch error compensation was performed. The results showed that the improvement of positional accuracy using pitch error compensation in this experiment was 5.49 μm, 9.41 μm and 1.35 μm in the X-axis, Y-axis and Z-axis, respectively.