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Electromagnetic Micro-Actuator with Silicon Membrane for Fluids Pump in Drug Delivery System

Roer Eka Pawinanto 1, Jumril Yunas 1,2, Aliyah Alwani 1,2, Nur Indah 1,2, and Sagir Alva 1,2
1. Universiti Kebangsaan Malaysia (UKM), Bangi, Malaysia
2. Universitas MercuBuana, Indonesia

Abstract—An electromagnetic (EM) micro-actuator with silicon membrane has been fabricated and characterized. The studied silicon based membrane is used as an actuator of a micropump system driven by magnetic force. The actuator consists of two main parts, namely, the electromagnetic part that generates electromagnetic field and the magneto mechanical part that enables the membrane deformation depending on the magnetic force strength on the silicon membrane. A standard Micro Electronic Mechanical System (MEMS) process was implemented to fabricate the actuator with an additional bonding between the actuator membrane and electromagnetic coil. The measurement results show that the 20 μm thin silicone membrane is capable of deformation with a maximum membrane deflection of approximately 4.5 μm which will be useful for a reliable fluids pump in a continuous drug delivery system. 

Index Terms—Electromagnetic micro-actuator, silicon membrane, microfluidic pump, drug delivery

Cite: Roer Eka Pawinanto, Jumril Yunas, Aliyah Alwani, Nur Indah, and Sagir Alva, "Electromagnetic Micro-Actuator with Silicon Membrane for Fluids Pump in Drug Delivery System" International Journal of Mechanical Engineering and Robotics Research, Vol. 8, No. 4, pp. 576-579, July 2019. DOI: 10.18178/ijmerr.8.4.576-579