Abstract—Micro machined cantilever platform offers an opportunity for the development and mass production of extremely sensitive low-cost sensors for real- time in situ sensing of many biological species. The merits of MEMS micro cantilever sensors are its high sensitivity, design simplicity, portability and high speed. In this paper, a micro cantilever sensor is designed to meet the requirements of a biosensor that detects tuberculosis. The addition of mass on the micro cantilever surface makes it to bend and vibrate with a resonance frequency. The advantages of incorporating stress concentrated region (SCR) on the piezoresistive micro cantilever and its optimal position for maximum sensitivity is also studied in this paper. Different shaped SCRs were modeled and it is found that rectangular shaped SCR is found to be suitable structure showing maximum sensitivity. FEA simulation tool Coventorware© has been used for the simulation.
 

Index Terms—MEMS, cantilever, piezoresistive mechanism, SCR

Cite: Neethu Karayil and K. J. Suja, "Performance Analysis of MEMS Piezoresistive Cantilever Based Sensor for Tuberculosis Detection Using Coventorware FEA," International Journal of Mechanical Engineering and Robotics Research, Vol. 6, No. 4, pp. 301-304, July 2017. DOI: 10.18178/ijmerr.6.4.301-304